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Ntega Maximus




Product Features

  • NTEGRA Maximus basement is a changeable center unit with a motorized stage. Sample movement is possible within 50mm by X,Y and within 0-360 degrees under rotation.
  • Automated measurements of many small samples are also possible with NTEGRA Maximus enabling high throughput screening.
  • Macro language tool included in the base system provides highest possible flexibility in a research procedure selection and tuning.
  • Scanning AFM head with capacitive sensors gives the system metrological properties.



    Scanning Probe Microscopy

    AFM (contact + semi-contact + non-contact) / Lateral Force Microscopy / Phase Imaging/Force Modulation/ Adhesion Force Imaging/ Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Microscopy/ Kelvin Probe Microscopy/ Spreading Resistance Imaging/ Lithography: AFM (Force and Current)


    Sample size

    Up to 100 mm in diameter, up to 15 mm in height

    Sample weight

    Up to 1 kg

    XY sample positiniong range

    Linear movement range

    50 mm

    Positioning resolution

    2.5 um

    Rotary movement range


    Positioning resolution


    Scan range

    50x50x5 um

    Sample holder

    Vacuum chuck

    Non-linearity, XY
    (with closed-loop sensors)

    ≤ 0.15%

    Noise level, Z
    (RMS in bandwidth 1000Hz)

    With sensors

    0.06 nm (typically), ≤ 0.07 nm

    Without sensors

    0.05 nm

    Noise level, XY*
    (RMS in bandwidth 200Hz)

    With sensors

    0.1 nm (typically), ≤ 0.2 nm

    Without sensors

    0.01 nm

    Linear dimension estimation error
    (with sensors)


    Optical viewing system

    Optical resolution

    1 um/3 um

    Field of view

    4.5-0.4 mm

    Continuous zoom


    Vibration isolation


    0.7-1000 Hz


    Above 1 kHz

    Built-in capacitive sensors have extremely low noise and any area down to 50x50 nm can be scanned with closed-loop control.

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