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EMA 400
Mask Aligner

 

   

Product Features

  • Economical, Compact & Hi-Level Performance
  • Viewing fused image of two alignment marks in the field of view
  • Integrator lens for exposure
  • LED illuminator

Application (Micromachine development in R&D center and university)

  • Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc
  • Exposure for Flip Chip/BGA/CSP
  • Exposure for Optical/High Speed Communication Components

 

  

 

Alignment Scope

Objectives separation

15 ˜ 75mm

Total magnification

100X

Illuminator for observation

Red LED (=633 nm)

X, Y Movement range of stage

±5 mm

Adjustment

±5°

Utility

Power source for main body and mercury lamp

AC 100V 50/60Hz 15A

Vacuum source

Below 21.3 Kpa (-80 Kpa from atmospheric pressure)

Exposure Unit

Lens

Integrator lens

Mercury lamp

250W ultra-high pressure vapor mercury lamp

Effective exposure area

Max 100 mm

Intensity distribution

±5% or less

Intensity of illumination

20 mW/cm2 (405 nm)

Exposure time control

Digital timer and rotary solenoid

Mercury Lamp Lighting Unit

AC 110V



Download Catalog
EMA 400.pdf
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